Pecvd System For Solar Cell Ar Coatings (Pecvd Lab-300)
Price:
Get Latest Price
In Stock
Product Overview
Key Features
Capacitively-Coupled PECVD system with loadlock chamber for R&D and small scale production.
Automatic loadlock system with cassette.
Uniform gas distribution through shower head.
Specifications
Substrate temperature uniformity : a A 2A C @400A C within 6"
Thickness uniformity of deposited layers : Cycle time : <15mins
Average throughput : Up to 21,600 wafers per year
Dimension : 1,730L A 1,027H A 1,832W (mm3)
Power : AC 2kW (13.56MHz) VHF & MF Power compatible
Gas : NF3/O2/H2/SiH4/N2/NH3/N2O/Ar
Substrate material : Si wafer
Pump : Dry(1,200l/min & 200l/min) & turbo(600l/s)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Automation in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
Related Products
Industrial Automation - Advanced Robotics System | Precision Control, Enhanced Efficiency, Real-Time Monitoring, Scalable Design
Price: 10000 INR
MOQ - 1 Watt/Watts
Khushi Control System
Ahmedabad, Gujarat
Yudian AI-7021-D5 DIN Rail Mounted-Industrial Automation
Price: 6100 INR
MOQ - 1 Piece/Pieces
Micon Automation Systems Pvt. Ltd.
Ahmedabad, Gujarat
Industrial Automated Solid Phase Extraction System - Application: Laboratory
Price: 3200000 INR
MOQ - 1 Unit/Units
Athena Technology
Thane, Maharashtra
Industrial Automation Division - Stainless Steel Construction, Energy-Saving Automatic Functions for Chemicals and Pharmaceuticals
MOQ - 1 Unit/Units
Victory Plant And Machinery Private Limited
Thane, Maharashtra
Industrial Automation System - Mild Steel, White Color | 4 HP, 440V Voltage, Warranty Included
Price: 400000 INR
MOQ - 1 Piece/Pieces
Imatics
Chennai, Tamil Nadu
Mega Customization 38x38x28mm Small Plastic 12V Cooling Fan for Industrial Automation
Price: 0.5 USD ($)
MOQ - 50 Piece/Pieces
Guangzhou Mega Technology Limited Company
Guangzhou, Guangdong
90 X 106 Mm Industrial Automation Plc System - Color: White And Green
MOQ - 1 Piece/Pieces
Messung Systems Private Limited
Pune, Maharashtra
Traverse Unit - Steel, 17 Models with Thrust Range 5-280 Kg | Type 1 & Type 2, Versatile for Various Industrial Applications
Psp Techno Engineers Pvt. Ltd.
Delhi, Delhi
Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Automation in Incheon
Report incorrect details
