
Thermal Cvd System For Uniform Sic Coating (Cvd Lab1200)
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Product Overview
Key Features
Thermal CVD system for SiC coating with MTS bubbler system.
PC control based on PLC.
Convenient Al2O3 tube setup.
Ion exchange type scrubber for SiH4 and Cl gases.
High sensitivity gas detectors for H2, Cl, C3H8.
Uniform 3 heating zone.
Specifications Heating range ~ 1200A C
Specifications
Average throughput : Up to 20,000 wafers per year
Dimension: 1,558L A 1,520H A 800W (mm3)
Power: 220V, 100A Gas : H2/C3H8/Ar/MTS (99%)
Furnace heater :A1(heating rate: 30A C/min, max. temp.: 1,400A C, deviation: A 5A C)
Pump : Rotary(600 l/min)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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